1. CMOS cantilever sensor systems: atomic force microscopy and gas sensing applications
Author: Lange, D.)Dirk(
Library: Central Library of Sharif University of Technology (Tehran)
Subject: Design and construction ، Microelectromechanical systems,Design and construction ، Metal oxide semiconductors, Complementary,Design and construction ، Levers,Equipment and supplies ، Atomic force microscopy,Design and construction ، Gas detectors
Classification :
TK
7875
.
L36
2002
